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光子晶体这类新型材料的出现使人们操纵和控制光子的梦想成为可能,全光集成也将会因光子晶体的应用有突破性进展.光子晶体集成能否实现将以光子晶体器件为基础,因此首先要研究并实现将在光子集成上有很大应用前景的半导体材料的各种有源和无源光子晶体器件.二维光子晶体研制的最实用和最重要手段是微加工方法.总结了近红外波段的二维光子晶体微加工方法,包括电子束曝光、模板选用和干法刻蚀等,并进行了评述和展望,介绍了自己的工艺方法.
The emergence of new materials such as photonic crystals makes it possible for people to manipulate and control their dreams of photons. All-optical integration will also make breakthroughs in the application of photonic crystals. Whether photonic crystal integration can be achieved will be based on photonic crystal devices First of all, we must study and realize a variety of active and passive photonic crystal devices that will have great application prospects in the photonic integration. The most practical and the most important means for the development of two-dimensional photonic crystals is the micro-machining method. The two-dimensional photonic crystal micromachining methods in the infrared band, including electron beam exposure, template selection and dry etching, are reviewed and discussed. Their own technological methods are introduced.