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介绍了各种常规CVD工艺及其特点 ,并结合现行广泛采用的均热法CVD工艺 ,综述了针对其不足而展开的一系列新工艺研究及进展。
A variety of conventional CVD processes and their characteristics are introduced. Combined with the widely used soaking CVD process, a series of research and development of new processes for their shortcomings are reviewed.