论文部分内容阅读
本文利用X光双晶衍射的动力学理论对垂直腔面发射激光器(VCSEL)的分布布喇格反射境(DBR)的特性曲线进行了模拟研究.从中得到DBRAlAs/AIxGa1-xAs的厚度及组分x值,应用所得到的这些数值进行光学薄膜反射谱的模拟计算,并与实验所测得的DBR反射谱进行比较,得到了证实.我们应用这套方法指导VCSEL外延片的生长,获得了良好的结果.
In this paper, we use the kinetic theory of X-ray twin crystal diffraction to simulate the distributed Bragg reflection (DBR) curve of a vertical cavity surface emitting laser (VCSEL). The thickness of DBRAlAs / AlxGa1-xAs and the value of component x were obtained. The calculated values of these films were used to simulate the reflection spectra of optical films and compared with the measured DBR reflectance spectra. We applied this method to guide the growth of VCSEL epitaxial wafers and achieved good results.