论文部分内容阅读
利用准分子激光微加工技术与模塑技术相结合的方法制造微流控芯片。用准分子激光在玻璃基胶层上刻蚀出加工质量较高的微流控生物芯片形貌,通过电铸技术对微流控芯片进行复制,得到反向金属模具。用金属模具通过注塑成型技术用聚碳酸酯注塑出微流控芯片。系统研究了准分子激光的能量密度和工作台移动速度对胶层微通道加工质量的影响;测量并分析了激光刻蚀加工出的微流控芯片原型、电铸的反向金属模板和注塑成型后的微流控芯片的轮廓精度和表面粗糙度,上表面尺度偏差不大于2μm,底面粗糙度小于20 nm。对注塑出的微流控芯片和激光直写刻蚀的几何结构相同的微流控芯片的流动性能进行比较测试。在流速较小时,用激光微加工技术与模塑技术相结合的方法加工的微通道比准分子激光直写法所加工的微通道流动性能更好。
Microfluidic chips are fabricated by a combination of excimer laser micromachining and molding techniques. Using the excimer laser to etch the top of the microfluidic biochip with high processing quality on the glass-based glue layer, the microfluidic chip is copied by electroforming technology to obtain the reverse metal mold. Microfluidic chips were injection molded from polycarbonate using a metal mold by injection molding. The effects of the energy density of the excimer laser and the moving speed of the stage on the processing quality of the microwells were systematically investigated. The prototype of the microfluidic chips processed by laser etching, the reverse metal template of electroforming and the injection molding After microfluidic chip contour accuracy and surface roughness, the upper surface of the standard deviation of not more than 2μm, the bottom surface roughness of less than 20 nm. The flow performance of the microfluidic chip with the same geometrical structure as that of the laser direct write-injected microfluidic chip was compared and tested. At low flow rates, microchannels fabricated by a combination of laser micromachining and molding techniques perform better than microchannels fabricated by excimer laser direct writing.