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我们发展了一种新的Monte Carlo模型用于模拟电子在固体中的散射过程和级联二次电子的产生及发射过程。这个模型不含参数,而且模拟计算出的背散射电子的能量分布与实验结果符合极好,证实了此Monte Carlo模型对于理解电子能谱分析术和扫描电子显微术中的物理过程是极为有效的。本文在介绍这个模型的同时还概述了Monte Carlo方法的发展历史,并总结了我们最近在MonteCarlo方法应用方面的一些工作,包括:俄歇电子能谱中背散射电子背景和非弹性散射俄歇电子背景的计算、扫描电镜中二次电子级联产生的计算机模拟、电子探针微分析术中连续X光谱背景的计算。
We have developed a new Monte Carlo model for simulating the scattering of electrons in solids and the generation and emission of cascaded secondary electrons. This model contains no parameters and the simulated energy distribution of backscattered electrons is in good agreement with the experimental results, confirming that this Monte Carlo model is extremely effective for understanding the physical processes in electron spectroscopy and scanning electron microscopy of. This paper presents an overview of the Monte Carlo method and its recent work on Monte Carlo methods, including the Backscattered Electron Background and the Non-Elastic Scattering Auger Electron in Auger Electron Spectroscopy Background calculation, computer simulation of secondary electron cascade in SEM, and calculation of continuous X-ray background in electronic probe microanalysis.