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本文提出了一种用ATR方法测定超薄膜光学常数,然后以透射率实时监控多层超薄吸收膜系厚度的方法;介绍了实验装置,分析了可能存在的误差并展示了用这种方法监控的一些镍—碳软X光反射镜的测量结果。
This paper presents a method for the determination of the optical constant of an ultrathin film by the ATR method, and then the method of monitoring the thickness of the multilayer ultrathin absorber film in real time by means of transmittance. The experimental apparatus is introduced, the possible errors are analyzed and the method of monitoring Some nickel-carbon soft X-ray reflectance measurements.