Lattice Constant α Calculation of PZT Films Prepared by a New Modified Sol-Gel Method

• 作 者: CHENZhu ZENGYong YANGCheng-tao
• 机 构: SchoolofMicroelectronicsandSolid.StateElectronics,CollegeofComputerScienceandTechnology
• 出 处: 中国电子科技：英文版
• 发表日期: 2005年2期
• 关键词: PZT 单体下冲 晶格常数 铁电膜 PZT precursor-monomers lattice constant α ferroelectric fil
• 基金项目: 国家重点基础研究发展计划(973计划)

PZT(Zr/Ti=52/48) ferroelectric films are prepared by a new modified Sol-Gel method from three stable-separated Pb2+, Zr4+, Ti4+ precursor-monomers. This method needs no distillation and has the advantage of easy change of the Pb2+/Zr4+/Ti4+ stoichiometric