论文部分内容阅读
为了达到国防部提出的获取低成本高性能红外焦平面列阵的目标,人们需要一种制造技术,这种技术根据器件的配置和截止波长具有内在的灵活性,而且根据所需的批量可容易地进行调整。这里采用的方法是为了使分子束外延技术完全发展到这样一个水平,即能以低廉的成本一次成功地制造出具有各种配置的探测器列阵薄片。作为一种气相过程,分子束外延技术直接适用于实时监视和过程控制、单片或多片生长方式以及生长参数的近瞬时改变。为了实施这一计划,目前已成立了一个联合小组。该小组的成员包括四个工业机构和一个大学,它们是洛克韦尔国际公司、休斯飞机公司、得克萨斯仪器公司和左治亚技术研究学院。由于该小组的成员都承担着供应和使用红外焦平面列阵的义务,小组成员之间的技术转让以实时方式进行。技术方法的重点是优化制造p-on-n HgCdTe双层异质结构焦平面列阵所必需的过程,减少过程变化,并且确证相对截止波长的灵活性。现已研究并制造出两种器件结构,一种是480×4元列阵,另一种是 128×128元列阵。
In order to meet the Department of Defense’s goal of obtaining a low-cost, high-performance infrared focal plane array, one needs a manufacturing technique that is inherently flexible based on the device’s configuration and cut-off wavelength and can be easily tailored to the desired batch size Adjust. The approach taken here is to fully develop molecular beam epitaxy to such a level that detector array sheets of various configurations can be successfully manufactured at a low cost. As a gas phase process, molecular beam epitaxy technology is directly applicable to real-time monitoring and process control, single or multi-plate growth mode and near-instantaneous change of growth parameters. To implement this plan, a joint team has now been established. The group includes four industrial institutions and a university, Rockwell International, Hughes Aircraft, Texas Instruments and the Georgia Institute of Technology. Since the members of the group are obliged to supply and use infrared focal plane arrays, the technology transfer among team members takes place in real time. The focus of the technical approach is to optimize the process necessary to fabricate a p-on-n HgCdTe two-layer heterostructure focal plane array, reduce process variations, and confirm the relative off-wavelength flexibility. Two kinds of device structures have been researched and manufactured, one is a 480 × 4 array and the other is a 128 × 128 array.