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一、前言在微压计的早期设计中就已用光的干涉技术,例如用迈克尔逊干涉仪。在干涉仪的每一个臂中有一个池,光线从两个池的镜面上反射。也有采用斐索干涉仪的,它通过油池底部和油层顶部表面二支反射光的复合来测量压力计油池的深度。最近有用相干原理测量压力计(压力量程达10~5帕)中的水银柱位移。但这些
I. INTRODUCTION Optical interferometry has been used in the early design of micro-pressure gauges, such as the Michelson interferometer. In each arm of the interferometer there is a pool of light that reflects off the mirrors of both pools. There are also Fizeau interferometers, which measure the depth of the gauge’s sump by combining the two reflected lights at the bottom of the sump with the top surface of the reservoir. Recent useful coherence principle to measure the pressure gauge (pressure range of 10 ~ 5 Pa) in the mercury column displacement. But these