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一九八五年十月三十日在上海市标准计量管理局主持下,对市科委下达的,由上海测试技术研究所、上海无线电十四厂、浙江大学、上海电子材料一厂等单位完成的“对CMOS电路用硅材料质量要求”研究项目进行了鉴定。与会专家和代表对该项成果给予了较高的评价。硅材料是集成电路的基础材料,材料和器件的关系是一个很复杂,难度较大的课题。多年来,从集成电路生产实际出发,人们希望弄清硅材料内在质量(除常规参数以外)与电路性能、成品率间的关系,
October 30, 1985 under the auspices of the Shanghai Municipal Bureau of Measurement Standards, Science and Technology Commission issued by the Shanghai Institute of Test Technology, Shanghai Radio 14 Factory, Zhejiang University, Shanghai Electronic Materials Factory and other units Completed “on the CMOS circuit with silicon material quality requirements” research project was identified. The experts and delegates at the conference gave a high opinion on this achievement. Silicon material is the basic material of integrated circuits, the relationship between materials and devices is a very complicated and difficult subject. Over the years, from the actual production of integrated circuits, people want to know the inherent quality of silicon materials (except for the conventional parameters) and circuit performance, the relationship between yield,