论文部分内容阅读
利用光学多通道分析仪（ＯＭＡⅢ）分析了脉冲激光沉积ＢａＴｉＯ３薄膜过程中激光诱导等离子体束的飞行时间谱。根据不同实验参数与条件下等离子体束的飞行时间谱的特征，讨论了条件对等离子体喷射速度的影响。结果表明，在脉冲激光沉积薄膜的情况下，喷射等离子体的飞行速度主要依赖于作用于靶面的激光能量密度。
The optical multi-channel analyzer (OMAⅢ) was used to analyze the time-of-flight spectra of laser-induced plasma beam during pulsed laser deposition of BaTiO3 thin films. According to the characteristics of the flight time spectrum of plasma beam under different experimental parameters and conditions, the influence of the conditions on the plasma jet velocity is discussed. The results show that in the case of pulsed laser deposition of thin films, the jet plasma jet speed depends mainly on the laser energy density acting on the target surface.