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长期以来等离子体化学气相沉积法广泛用于薄膜材料的合成。自纳米碳管被发现以后 ,该方法已成为纳米碳管合成的一种非常重要的手段。本研究以 1 0 X和 1 3X分子筛为载体 ,在纳米钴颗粒的催化作用下 ,利用微波等离子体化学气相沉积法在较低的温度条件下合成了纳米碳管。
For a long time, plasma chemical vapor deposition is widely used in the synthesis of thin film materials. Since the discovery of carbon nanotubes, this method has become a very important means of carbon nanotube synthesis. In this study, 1 0 X and 1 3X zeolites were used as supports to synthesize carbon nanotubes at low temperature by microwave plasma chemical vapor deposition under the catalysis of cobalt nanoparticles.