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采用直流反应磁控溅射法制备了Cu1-xCoxO(0.02≤x≤0.14)复合氧化物电极。利用XRD、EDS和SEM分析技术对沉积氧化物的晶体结构、化学组成及表面形貌进行了表征,并利用循环伏安、线性扫描及电化学交流阻抗对沉积氧化物电极的电化学性能进行了测试。XRD分析结果显示复合氧化物Cu1-xCoxO具有CuO单斜晶体结构,不存在氧化钴独立相。电化学测试结果表明Cu1-xCoxO复合氧化物电极对水氧化反应的催化活性远高于CuO和Co3O4电极,更好的催化活性、较低的电阻和高的表面粗糙度是Cu1-xCoxO复合氧化物电极催化活性提高的主要原因。生成最优Cu1-xCoxO(0.02≤x≤0.14)复合氧化物的溅射功率为45W(Co)、100W(Cu)。
Cu1-xCoxO (0.02≤x≤0.14) composite oxide electrodes were prepared by DC reactive magnetron sputtering. The crystal structure, chemical composition and surface morphology of the deposited oxides were characterized by XRD, EDS and SEM. The electrochemical properties of the deposited oxide electrodes were characterized by cyclic voltammetry, linear scanning and electrochemical impedance spectroscopy test. XRD analysis showed that the Cu1-xCoxO complex has a CuO monoclinic structure without the presence of an independent phase of cobalt oxide. The results of electrochemical tests showed that the catalytic activity of Cu1-xCoxO composite oxide electrode for water oxidation reaction is much higher than that of CuO and Co3O4 electrode, and the catalytic activity is better. The lower electrical resistance and high surface roughness are Cu1-xCoxO composite oxide Electrode catalytic activity increased the main reason. The sputtering power for generating the optimal Cu1-xCoxO (0.02≤x≤0.14) composite oxide was 45 W (Co) and 100 W (Cu).