论文部分内容阅读
在室温下测量了掺氧非晶硅薄膜的正电子寿命谱．实验发现，随着掺氧量的增加，正电子寿命减小，对应的相对强度增加．据此，本文从电子密度、悬挂键和微空洞等方面讨论了氧掺杂对非晶硅薄膜微观结构的影响．
Positron lifetime spectra of the oxygen-doped amorphous silicon thin films were measured at room temperature. The experimental results show that with the increase of oxygen content, the positron lifetime decreases and the corresponding relative intensity increases. Accordingly, this paper discusses the influence of oxygen doping on the microstructure of amorphous silicon thin films from the aspects of electron density, dangling bonds and microvoids.