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采用粉末包埋渗和磁控溅射的方法在石墨基体上制备了以SiC作为过渡层的ZrC/MoSi_2微叠层涂层,并用XRD和SEM对涂层的相组成和显微结构进行了分析,同时用感应加热超高温实验系统测试了涂层在1600℃以上空气中的抗氧化性能。结果表明:磁控溅射所制备的ZrC/MoSi_2微叠层涂层较为致密;涂层在1800℃的空气中具有较好的抗氧化能力,氧化15 min后单位面积氧化失重率为0.3×10~(-2)g/cm~2,仅为石墨的2.9%。氧化后生成具有层状结构的SiO_2和m-ZrO_2,熔融态SiO_2可愈合ZrO_2层内的空洞和微裂纹,有效地阻挡氧向内扩散。氧化层由ZrO_2和SiO_2组成,氧化产物呈层状结构且各层较为致密。
The ZrC / MoSi_2 micro-stack with SiC as the transition layer was prepared on the graphite substrate by powder embedding and magnetron sputtering. The phase composition and microstructure of the coating were analyzed by XRD and SEM , At the same time with the induction heating ultra-high temperature test system to test the coating in the air above 1600 ℃ oxidation resistance. The results show that the ZrC / MoSi_2 micro-layer coatings prepared by magnetron sputtering are dense, the coatings have good oxidation resistance in air at 1800 ℃, and the oxidation loss weight loss per unit area after oxidation is 0.3 × 10 ~ (-2) g / cm ~ 2, only 2.9% of graphite. After oxidation, SiO 2 and m-ZrO 2 with layered structure are formed. The molten SiO 2 can heal the cavities and micro-cracks in the ZrO 2 layer, effectively blocking the inward diffusion of oxygen. The oxide layer is composed of ZrO 2 and SiO 2, the oxidation products are layered structure and each layer is more dense.