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采用ＰＥＣＶＤ方法制备了氧化物簿膜，为了改善气体敏感特性，将几种元素覆盖于薄膜表面进行了表面修饰。
The oxide film was prepared by PECVD method. In order to improve the gas sensitive properties, several elements were coated on the surface of the film to modify the surface.