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该系统是采用微机技术设计的一台用于检测离子注入、扩散掺杂工艺均匀性和重复性的自动化测量及数据处理系统(照片内左侧部分)。可与半自动探针台及手动探针台联用,用范德堡法及正方阵列,直线阵列四探针法进行自动测量及数据处理。具有速度快、功能全等特点。最近已通过技术鉴定,确认为国内较先进的自动测量及数据处理系统,具有一定的使用价值。本系统可向用户提供,欲购者请与湖南长沙96号信箱朱文章联系,电话:35811,电报挂号:1501。
The system is an automated measurement and data processing system (the left part of the photo) designed to detect ion implantation, diffusion and doping process uniformity and repeatability using microcomputer technology. Can be used with semi-automatic probe station and manual probe station with Vanderbilt method and square array, four-probe linear array method for automatic measurement and data processing. With fast, full-featured features. Has recently passed the technical appraisal, confirmed as the more advanced automatic measurement and data processing system, has a certain use value. The system can be provided to users, buyers want to contact Zhu Changsha, Hunan, No. 96 mailbox article Tel: 35811, Telegraph registered: 1501.