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IELDVD060:9322:29630-41 0600375 红外显微镜中的光谱成像(半导体器件／IC)=Spectral imaging in infrared microscope[semiconductor device／IC investigation][会,英]／Bailon,M．F．／／Physical and Failure Analysis of Integrated Circuits,2004．IPFA 2004．Proceedings of the 11th International Symposium on the．-41-44(A) We present the 2D emission spectral imaging capability developed for the infrared emission microscope (IREM)tool．This innovative technique can provide fundamental physical information on the nature of emissions in device structures and can therefore be use for quick and accurate detection and identification of discrete elements in ICs．
IELDVD060: 9322: 29630-41 0600375 Spectral imaging in infrared microscope (semiconductor device / IC) F. // Physical and Failure Analysis of Integrated Circuits, 2004. IPFA 2004. Proceedings of the 11th International Symposium on the. -41-44 (A) We present the 2D emission spectral imaging capability capability for the infrared emission microscope (IREM) tool. This innovative technique can provide fundamental physical information on the nature of emissions in device structures and can therefore be use for quick and accurate detection and identification of discrete elements in ICs.