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照相机和望远镜等光学装置用的透镜、反射镜、棱镜等光学零件,比一般金属加工件的精度要求高1～2个数量级(波长的几分之一)。因此,用机械法测量其形状是困难的,所以早已用干涉法等光学法来测量。特别是近年用激光作干涉仪器的光
Optical components such as lenses and mirrors and prisms used in optical devices such as cameras and telescopes are one to two orders of magnitude (one fraction of wavelength) higher than the accuracy requirements of common metal parts. Therefore, it is difficult to measure the shape by the mechanical method, so it has long been measured by the optical method such as the interference method. Especially in recent years as a laser interferometer light