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以聚合物ZPU44和ZPU46作为波导包层和芯层材料,设计并制备了基于Mach-Zehnder干涉仪(MZI)的集成折射率传感器。设计并优化了波导截面参数、弯曲半径和传感窗长度等结构参数,分析了其折射率传感特性,进而采用光刻、反应离子刻蚀(RIE)等传统的微加工工艺制备了聚合物MZI折射率传感芯片。测试结果表明,制备的聚合物MZI传感器在1.33~1.44的折射率变化范围内具有较好的线性度,折射率灵敏度约为88dBm/RIU,与设计基本符合。本文的聚合物折射率传感器传感窗长度小,容易实现阵列化,在生化传感领域有很好的应用前景。
With the polymer ZPU44 and ZPU46 as waveguide cladding and core material, an integrated refractive index sensor based on Mach-Zehnder interferometer (MZI) was designed and fabricated. The structural parameters such as waveguide cross-section parameters, bending radius and sensing window length were designed and optimized, and the refractive index sensing characteristics were analyzed. Then the conventional micro-fabrication techniques such as photolithography and reactive ion etching (RIE) MZI refractive index sensor chip. The test results show that the prepared polymer MZI sensor has a good linearity in the refractive index range of 1.33-1.44, and the refractive index sensitivity is about 88dBm / RIU, which is in good agreement with the design. The polymer refractive index sensor has the advantages of small sensing window length, easy array realization, and good application prospect in the biochemical sensing field.