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用线宽0.58微米声表面波(SAW)双叉指换能器(4F叉指换能器)的三次谐波通带制成了无外部滤波和匹配网络的2千兆赫SAW振荡器.本文以亚微米图案形成工艺的现有水平为基础,讨论了千兆赫SAW延迟线谐波振荡器用的延迟线滤波器的简单设计技术,还描述了用普通接触印刷的业微米线宽叉指换能器图案形成的理论考虑和实验结果.不用制离工艺而用接触印刷在旋转Y切石英上成功地制出了孔径为0.4毫米、由622条线组成的线宽为0.58微米的4F叉指换能器.评论了这种SAW延迟线谐波滤波器的频率响应及这种2千兆赫器件的性能.
A 2 GHz SAW oscillator without external filtering and matching network was fabricated with the third harmonic passband of a SAW double-finger (4F interdigital transducer) Based on the current state of the submicron patterning process, a simple design technique for a delay line filter for a gigahertz SAW delay line harmonic oscillator is discussed, as is an industry-standard line width interdigital The theoretical considerations and experimental results of the pattern formation of the device are shown in Fig. 1. The 4F interdigitated finger with a diameter of 0.4 mm and a line width of 0.58 μm with a hole diameter of 0.4 mm was successfully fabricated by contact printing on a rotating Y- The frequency response of this SAW delay line harmonic filter and the performance of this 2 GHz device were reviewed.