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为了实现了电容式传感器和其他信号处理电路之间的接口,提出了一种电容式传感器接口电路。该接口电路基于开关电容技术,采用采样电荷结构,并在其前端读出电路采用采样开关噪声消除技术,在0.35μm 2P-4 M CMOS标准工艺下设计并流片实现,且特别适用于开环或力平衡闭环电容式微加速度计和振动角速度陀螺仪应用。测试结果表明:在1 MHz的采样时钟下,该接口电路取得了约5.35 aF的电容分辨率和约0.173 aF.Hz-1/2的噪声基底。
In order to realize the interface between the capacitive sensor and other signal processing circuits, a capacitive sensor interface circuit is proposed. The interface circuit is based on the switched-capacitor technology, adopts the sampled charge structure, and adopts the sampling switch noise elimination technology at the front-end readout circuit. The interface circuit is designed and fabricated in 0.35 μm 2P-4 M CMOS standard process and is especially suitable for open-loop Or force-balanced closed-loop capacitive micro-accelerometer and vibration angular velocity gyroscope applications. The test results show that the interface circuit achieves a capacitance resolution of about 5.35 aF and a noise floor of about 0.173 aF.Hz-1/2 at a 1 MHz sampling clock.