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本文利用EB-PVD工艺在高温合金表面制备SiC/ZrO2防热涂层,对制备态和不同温度晶化处理后的涂层进行了微观组织结构分析。结果表明,随退火温度升高,SiC结晶程度提高,Ramam光谱出现了SiC的TO带和LO带;SiC层中分散的sp2杂化碳团簇产生了急剧的聚集,形成了大的团簇结构。退火处理后SiC表层发生钝性氧化,涂层表面C元素含量大幅度减少,而O元素含量迅速增加;XPSC1s和Si2p谱峰的中心向高结合能方向发生了偏移;表层中C-C键的含量减少,Si-O键的含量逐渐增加。
In this paper, SiC / ZrO2 thermal-resistant coatings were prepared on the superalloy surface by EB-PVD process. The microstructure of the coatings after the crystallization at different temperatures were analyzed. The results show that as the annealing temperature increases, the degree of crystallization of SiC increases, and the TO band and LO band of SiC appear in the Ramam spectrum. The sp2 hybridized carbon clusters dispersed in the SiC layer produce a sharp aggregation and form a large cluster structure . After annealing, the surface of SiC layer was blunt oxidized, the content of C element on the surface of the coating decreased greatly, and the content of O element increased rapidly. The center of XPSC1s and Si2p peak shifted to high binding energy. The content of CC bond Decrease, Si-O bond content gradually increased.