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根据硅粉纯化的要求,提供了一种长落程和高反应速率的冷等离体反应器。工艺参数的选择着重于增大鞘层厚度、提高反应粒子浓度和控制抽气速率,因此,能有效的提高纯化反应的速率、粉料的回收率和粉粒一次沉降的时间。实验结果表明:该设备能将纯度为99%的工业硅纯化为约99.99%的太阳级硅。
According to the requirements of silica fume purification, a cold plasma reactor with long range and high reaction rate is provided. The choice of process parameters focuses on increasing the thickness of the sheath, increasing the concentration of the reactive particles and controlling the pumping rate. Therefore, the rate of the purification reaction, the recovery rate of the powder material and the time of settling of the particles can be effectively improved. The experimental results show that the device can purify 99% pure industrial silicon to about 99.99% solar-grade silicon.