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利用电场改变液滴透镜的面形得到非球面,并实时检测其面形和焦斑图像,在适当的时候用紫外光固化液滴制作具有良好光学性能的非球面微透镜。比较了非球面液滴微透镜在固化前后面形、焦斑的变化和对透镜性能的影响,讨论了液滴透镜在固化过程中变形的机理和相应的解决方法。用分辨率50 nm的光斑探针扫描仪精确测量了固化后的非球面微透镜的聚焦光斑,测得了光斑轴向分布曲线和均方根直径3.384μm的聚焦光斑,经图像处理计算了透镜的点扩散函数和光学传递函数,评价了所制作的非球面微透镜的聚光和成像能力,并给出了透镜的实际成像图像,对于完善高品质非球面微透镜及其阵列的制作工艺具有重要意义。
Use the electric field to change the surface shape of the drop lens to obtain the aspherical surface, and detect the surface shape and the focal spot image in real time, and make the aspherical microlens with good optical performance by UV solidification droplet when appropriate. The changes of surface shape and focal spot of aspherical liquid droplet microlens before and after curing were compared with those of lens. The mechanism of deformation of liquid droplet lens during curing and corresponding solutions were discussed. The focal spot of solidified aspherical microlens was accurately measured with a spot probe scanner with a resolution of 50 nm. The axial distribution curve of the spot and the focused spot with the root mean square diameter of 3.384μm were measured. After the image processing of the lens Point spread function and optical transfer function to evaluate the focusing and imaging ability of the aspherical micro-lens produced, and give the actual imaging images of the lens, which are important to improve the manufacturing process of high-quality aspheric micro-lens and its array significance.