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上海光源(SSRF)光束线站上使用的精密光学狭缝要求重复精度小于1μm,在精密狭缝安装到光束线站前需要在线或者离线对其进行重复精度测量。提出了基于高分辨率CCD和高倍率镜头的机器视觉测量系统,设计出一种图像多级滤波的数据处理方法,从而实现了精密光学狭缝重复精度的测量。测量之前,通过测量系统对光学分辨率板标准小孔采集图像,完成了高倍率放大镜头倍率标定。利用代数均值滤波、统计中值滤波、最小均方误差滤波有效降低图像随机噪声。提出将狭缝图像二值化,并将狭缝刀片移动前后两帧二值图像差值,从而得到狭缝的重复精度。该系统的测量分辨率达到0.3μm。结果表明,该测量系统能够满足精密狭缝的重复精度的测量。
Precision optical slits used on Shanghai Light Source (SSRF) beamline stations require repeatability of less than 1μm and repeatability measurements on-line or off-line before precision slits are installed at a beamline station. A machine vision measuring system based on high resolution CCD and high magnification lens was proposed, and a data processing method of image multistage filtering was designed. The precision of optical slit repetition was measured. Prior to measurement, the magnification of the magnification lens was calibrated with the measurement system acquiring the image of the standard aperture of the optical resolution plate. Using algebra mean filtering, median filtering, minimum mean square error filtering to reduce image random noise effectively. Proposed the binarization of the slit image, and the difference between the two images before and after the slit blade moving, so as to obtain the repetition accuracy of the slit. The system’s measurement resolution of 0.3μm. The results show that the measurement system can meet the precision of slit precision measurement.