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采用WO3陶瓷靶直流溅射制作了电致变色膜.介绍了制膜工艺.分析测试表明,膜有无定形结构;除有正常成分WO3外,还含有来自衬底及反应室内的微量杂质.电致变色谱响应特性和电化学特性的测量证明,膜的电色活性良好.还对实验结果作了理论分析.
Electrochromic films were fabricated by DC sputtering of WO3 ceramic target. Introduced the film making process. Analytical tests show that the membrane has an amorphous structure; besides the normal component WO3, it contains trace impurities from the substrate and the reaction chamber. The results of electrochromic response and electrochemical measurements show that the electrochromic activity of the films is good. The experimental results also made a theoretical analysis.