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目前用定压法测试泵的抽气速率时,流量计测得的只是充入测试罩的气流量,而未能测得并计入测试罩本底气流量。然而规管在测试罩指定位置测量压力时,两种气流量同时存在。该压力值包本底压力。所以,参照苏联学者 的理论,本文提出在测试计算中,应将实测气流量与压力差之比值定义为抽气速率值更接近实际。该压力差为实测压力值与极限压力值之差。关于充入测试罩的气流量的计算,本文参照有关文献,采用不同压力单位对照研究,阐明一系列测试计算公式的演变、沿革。并给出详尽的推导过程及精确的计算公式,以便为采用计算机软件,编制程序以及为将来编制、修订标准时提供理论依据。
At present, when the pumping rate of the pump is measured by the constant pressure method, the flowmeter only measures the amount of air flow into the test cover, and fails to measure and count the air flow of the test cover. However, regulating the pressure measurement at the designated location of the test hood, both gas flows exist simultaneously. The pressure package background pressure. Therefore, referring to the Soviet scholar’s theory, this paper proposes that in the test calculation, the ratio of the measured gas flow to the pressure difference should be defined as the value of the suction rate closer to the actual value. The pressure difference is the difference between the measured pressure value and the limit pressure value. With regard to the calculation of the gas flow filled into the test hood, this paper refers to the relevant literature and adopts different pressure units control studies to elucidate the evolution and evolution of a series of test calculation formulas. And gives detailed derivation process and accurate calculation formula, in order to provide theoretical basis for the use of computer software, programming and for the future preparation, revision of the standard.