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一、引言采用无油或半无油系统排气,对提高电子管的质量和良品率有显著的效果。同时,也能避免因突然停电、停水等所造成的损失。目前,大多采用溅射离子泵为主泵,升华泵为辅泵的系统。这种系统结构复杂、制造困难。我们试制了一种小型电子轰击式钛升华泵为主泵的磁控管半无油排气装置。具有体积小、结构简单、
First, the introduction of oil-free or semi-oil-free exhaust system to improve the quality of electronic tubes and yield a significant effect. At the same time, but also to avoid sudden power outages, water and other losses caused. At present, most of the sputtering ion pump for the main pump, sublimation pump for the secondary pump system. The system is complex and difficult to manufacture. We trial-produced a small electronic impact titanium sublimation pump as the main pump magnetron semi-oil-free exhaust. With small size, simple structure,