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在30 kW级直流电弧等离子喷射化学气相沉积装置下,采用Ar-H2-CH4混合气体,通过控制工艺参数,在多晶钼衬底上制备了微纳米复合多层金刚石自支撑膜。采用拉曼光谱对其进行成份分析、SEM观察膜体表面形貌,采用聚焦离子束(FIB)技术对其进行原位刻蚀,用高分辨电镜观察对其进行微观表征。结果显示,同普通微米膜相比,多层膜体是由微米晶金刚石层和纳米晶金刚石层组成,表面光滑,微米层与纳米层间具有相互嵌套式的界面,微/纳米复合多层金刚石自支撑膜中包含有纳米级金刚石晶粒、微米级金刚石晶粒和无定形碳。
The micro-nano composite multi-layer diamond self-supporting film was prepared on polycrystalline molybdenum substrate by controlling the process parameters under a 30 kW grade DC arc plasma jet chemical vapor deposition apparatus using Ar-H2-CH4 mixed gas. The composition of the film was analyzed by Raman spectroscopy. The surface morphology of the film was observed by SEM. The in situ etching was performed by focused ion beam (FIB) technique. The microstructure was characterized by high resolution electron microscopy. The results show that, compared with the common micro-membrane, the multi-layered membrane is composed of microgranular diamond and nanocrystalline diamond with a smooth surface. The micro-nanofilms have a nested interface with each other. The micro / nano- Diamond self-supporting film contains nano-scale diamond grains, micron diamond grains and amorphous carbon.