Determination of the Deep Levels of Transition Metals in n-Type Silicon by Using DLTS Method

• 作 者: Sun Yicai Wang Zhijin Dang
• 机 构: HebeiTechnicalInst
• 出 处: 稀有金属：英文版
• 发表日期: 1989年3期
• 关键词: CORRESPONDENCE EXACTLY metallic IMPURITY Transition ENOUGH latter manganese 侧刃 n

1.IntroductionSince the correspondence between theimpurity and its energy levels within the bandsis not exactly known enough,it is difficult toassign the impurity according to its levels.Inthis work,several metallic impurities were in-tentionally doped in