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本文中,发现在In_xGa_(1-x)As缓冲层上非故意掺杂的InyGa_(1-y)As/(Al)GaAs超晶格样品中存在着两个互相反向的自建电场区,一个位于样品表面,另一个位于In_xGa_(1-x)As缓冲层和超晶格界面.据此,合理地解释了样品的光伏测试结果,并对此类样品的MOCVD生长工艺给予指导.
In this paper, we found that there are two self-built electric field regions opposite to each other in the InyGa 1-x As / One on the sample surface and the other on the In_xGa_ (1-x) As buffer layer and superlattice interface. According to this, the PV test results of the samples are reasonably explained, and the MOCVD growth process of such samples is instructed.