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没有油的真空泵在高真空获得方面,过去经常使用扩散泵.扩散泵的优点是:工作效率高、没有转动部分、不需要特殊的电源和控制台、使用简便可靠,而且价格比较低廉.但是它也有一些明显的缺点.首先是在超高真空范围内抽气速率跌落得十分显著,甚至完全不能工作;其次是扩散泵内工作液体的蒸汽将逆流入真空容器而使严重沾污.这两个缺点虽然在近年来已经用油挡板、串联冷阱(或者金属片阱和氧化铝阱)、可烘烤接头及无脂阀门等方法逐步加以克服,但在操作上无疑还有很多不方便之处.第三个缺点则是扩散泵体积虽然相对于抽气速率来说不能算大,但毕竟不容易移动.特别在电子管工业方面,它不能和电子器件组成一个封闭系统进行连续抽气.由于以上的缺点,就迫使人们对新的获得真空(特别是超高真空)的方法进行探索,结果就出现了“钛泵”.
Oil-free vacuum pumps used to be diffusion pumps in high vacuum applications. The advantages of diffusion pumps are: high operating efficiency, no rotating parts, no special power supply and console, ease of use and low cost, but it There are also some obvious shortcomings: firstly, the pumping rate drops very significantly or even completely out of work in the ultra-high vacuum range; secondly, the steam in the working fluid in the diffusion pump will flow back into the vacuum container to cause serious contamination Disadvantages While oil baffles, tandem cold traps (or sheet traps and alumina traps), bake joints, and greaseless valves have been gradually overcome in recent years, there are certainly many inconveniences in operation Department of the third drawback is that although the diffusion pump volume relative to the exhaust rate can not be considered large, but after all, not easy to move.Especially in the tube industry, it can not form a closed system with electronic devices for continuous extraction.As a result of The above shortcomings have forced the search for new ways to get a vacuum, especially ultra-high vacuum, resulting in a “titanium pump.”