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采用直流磁控溅射技术制备TiAlCN薄膜,研究了直流电流对TiAlCN薄膜的薄膜成分、微观结构、机械性能和摩擦性能的影响.研究表明:随着直流电流的增加,薄膜中C元素含量逐渐降低;薄膜中无定形碳含量减少,而(Ti,Al)CxN1-x晶粒增加.另外,在低于3.0 A直流电流范围内薄膜的表面粗糙度无明显变化,而当直流电流高于3.0 A时,薄膜的表面粗糙度随直流电流的增加而显著上升.随着直流电流的增大,薄膜的硬度先增加后降低,而薄膜的摩擦系数则先降低后升高.在直流电流为3.5 A时,薄膜的硬度和摩擦系数分别约为22.2 GPa和0.16.
The effects of DC current on the composition, microstructure, mechanical properties and tribological properties of TiAlCN films were investigated by direct current magnetron sputtering. The results show that with the increase of DC current, the content of C elements in the films gradually decreases (Ti, Al) CxN1-x grains increased. In addition, the surface roughness of the films did not change significantly in the DC current range of less than 3.0 A, but when the DC current was higher than 3.0 A , The surface roughness of the film increases with the increase of DC current.With the increase of DC current, the hardness of the film first increases and then decreases, while the friction coefficient of the film first decreases and then increases.When the DC current is 3.5 A , The film’s hardness and friction coefficient are about 22.2 GPa and 0.16, respectively.