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提出一种新型三自由度微机器人的机械结构及其控制系统。微机器人的机构具有三轴一体、体积小和内藏传感器等特点。计算机仿真和实验结果表明，该微机器人的动态性能好，重复精度高，既可以单独使用，也可安装在一般工业机器人的终端执行器上，从而构成高精度装配机器人和能进行各种檄操作的高精度机器人。
A new type of three degrees-of-freedom micro-robot mechanical structure and control system. Micro-robot body with a three-axis, small size and built-in sensors and so on. Computer simulation and experimental results show that the micro-robot has good dynamic performance and high repetition accuracy. It can be used alone or in the terminal actuators of general industrial robots to form high-precision assembly robots and can perform various operations High-precision robot.