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利用紫外和电子顺磁共振光谱学研究了干燥的重铬酸盐光致抗蚀剂的光化反应.铬离子中最重要的一种似乎是铬(Ⅴ).目前对铬(Ⅴ)的确切结构尚不清楚。但相信它是铬(Ⅴ)酯或某种配价络合物.也对在暗处的重铬酸盐光致抗蚀剂的铬(Ⅴ)进行研究.Cr(Ⅵ)向 Cr(Ⅴ)的转换以及 Cr(Ⅴ)在暗处和曝光中的稳定性取决于有机还原剂的结构。光谱灵敏度数据表明,铬)Ⅴ)在600nm 区域是感光的.对染料进行适当的选择,使其三重态能量大于铬(Ⅴ)络合物的三重基态能量,则对重铬酸盐光致抗蚀剂采用的染料敏化是可能的。铬(Ⅲ)配价络合物具有一种聚合结构,它是促使光致抗蚀剂不溶性的原因。铬(Ⅲ)配阶络合物的结构及其从铬(Ⅴ)形成的机制至今尚不清楚。
The photochemical reaction of dry dichromate photoresists was studied by UV and electron paramagnetic resonance spectroscopy. The most important one of the chromium ions appears to be chromium (Ⅴ) The structure is not clear. However, it is believed to be a chromium (V) ester or a complex of some valences, as well as chromium (V) in dichromated photoresist in the dark. Cr (V) And the stability of Cr (V) in the dark and in exposure depends on the structure of the organic reductant. Spectral sensitivity data indicate that chromium) V) is sensitized at 600 nm.Dyes are appropriately selected to have a triplet energy greater than the triplet state energy of the chromium (V) complex, then the dichromate photoluminescence Dye sensitization for etchants is possible. Chromium (III) valence complexes have a polymeric structure that contributes to the insolubility of the photoresist. The structure of chromium (Ⅲ) complex complexes and the mechanism of their formation from chromium (Ⅴ) are still unclear.