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针对传统顶发射垂直腔面发射激光器(VCSEL)的散热、电极生长以及Au丝引线等难题,研究了一种非闭合型的大功率VCSEL结构,不仅解决了上述问题,还简化了工艺步骤,避免了一些工艺对已形成器件结构造成的损伤,提高了激光器的可靠性以及电流注入效率。利用该结构制作的激光器室温下连续输出最大功率达到46 mW,激射波长为849.5 nm,激射光谱半高宽(FWHM)为0.6 nm;在150 mA的注入电流下,发散角为10°。在室温5、0μs脉冲条件下,测得的最高输出光功率为69 mW。
Aiming at the problems of heat dissipation, electrode growth and Au wire lead of the conventional top-emitting vertical cavity surface-emitting laser (VCSEL), a non-closed high-power VCSEL structure is studied, which not only solves the above problems but also simplifies the process steps and avoids Some processes have caused damage to the formed device structure, improving the reliability of the laser and the current injection efficiency. The maximum output power of the laser with this structure was 46 mW continuously at room temperature, the lasing wavelength was 849.5 nm and the full width at half maximum (FWHM) of the laser spectrum was 0.6 nm. The divergence angle was 10 ° at the injection current of 150 mA. The maximum output optical power was 69 mW at 5,0 μs pulse at room temperature.