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高性能XY平台普遍应用于集成电路(IC)制造和封装设备中。为获得较高加速度,提出了一种单边双直线电机冗余驱动的新型XY定位平台。冗余驱动系统在高速和高加速运动时均存在同步运动精度问题。针对X轴向双直线电机的同步驱动控制,建立了冗余驱动数学模型,并基于模型参考自适应控制和自适应模糊控制算法,设计了运动控制器,确保了同步运动精度。仿真结果表明,在较高加速度运动时,系统具有良好的静态、动态性能和较高的同步运动精度。
High-performance XY platforms are commonly found in integrated circuit (IC) manufacturing and packaging equipment. In order to obtain higher acceleration, a new XY positioning platform with redundant drive of single-sided double linear motor was proposed. Redundant drive system in the high-speed and high-speed movement, there are synchronous motion accuracy problems. Aiming at the synchronous drive control of X-axis double linear motor, a mathematical model of redundant drive was established. Based on model reference adaptive control and adaptive fuzzy control algorithm, a motion controller was designed to ensure synchronous motion accuracy. The simulation results show that the system has good static and dynamic performance and high synchronous motion accuracy at higher acceleration.