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用热丝助化学汽相反应法沉积了nc－Si：H薄膜，测量了它的喇曼散射谱，由透射电子显微镜直接测量了晶粒的大小和分布．应用声子强限制模型和球形粒子假设，并考虑到纳米晶粒的分布对样品的喇曼散射谱进行了拟合．结果表明，在考虑到纳米粒子的尺寸分布后，采用指数权重函数比采用高斯型权重函数更接近于实验测量的喇曼谱．
The nc-Si: H thin film was deposited by hot wire assisted chemical vapor deposition reaction, and its Raman scattering spectrum was measured. The size and distribution of the grains were directly measured by transmission electron microscopy. The strong phonon confinement model and spherical particle assumption were used to fit the Raman scattering spectra of the samples, taking into account the distribution of nanocrystalline grains. The results show that, taking into account the size distribution of nanoparticles, the use of exponential weight function than Gaussian-type weight function closer to the experimental measurement of Raman spectrum.