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聚合物基功率分束器作为低成本和易制备的集成光子器件受到了广泛的关注。利用自映像理论设计了可见光波段聚合物基1×4光功率分束器。在输入/输出波导和多模干涉耦合区连接部分引入了锥形结构以降低附加损耗。分析了多模干涉区的制备容差,包括长度、宽度和残留层厚度的偏差对附加损耗和均衡度的影响。仿真结果表明所优化的多模干涉分束器具备高性能和良好的制备容差。
Polymer-based power beamsplitters have received widespread attention as low-cost and easy-to-make integrated photonic devices. The visible light band polymer based 1 × 4 optical power beamsplitter was designed by self-imaging theory. A tapered structure is introduced at the input / output waveguide and multimode interference coupling junction to reduce additional losses. The preparation tolerance of multi-mode interference zone is analyzed, including the influence of the deviation of length, width and residual layer thickness on the additional loss and balance. Simulation results show that the optimized multi-mode interference beam splitter has high performance and good preparation tolerance.