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利用透射电子显微镜对质子辐照前后空间太阳望远镜Mo/Si多层膜的微观结构进行了表征,并对其辐照前后反射率的变化进行了测量.研究表明,Mo/Si多层膜经质子辐照后形成了一些缺陷结构,局部区域Mo/Si的周期性遭到破坏,Mo层与si层的宽度发生了变化,多层膜层与层之间的界面也比辐照前更为粗糙,部分层状结构由于质子辐照发生了明显的扭曲和折断等现象;此外,质子辐照导致了Mo/Si多层膜反射率的下降,这些微观缺陷的形成是光学性能降低的直接诱因.
The microstructures of Mo / Si multilayers before and after proton irradiation were characterized by transmission electron microscopy and the changes of their reflectivity before and after irradiation were measured.The results show that the Mo / Some defect structures were formed after irradiation, the periodicity of Mo / Si in the local area was destroyed, the width of Mo layer and Si layer changed, and the interface between multilayer film and layer was also rougher than that before irradiation In addition, proton radiation caused a significant decrease in the reflectivity of the Mo / Si multilayers. The formation of these microscopic defects was the direct cause of the decrease in optical properties.