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针对传统液压系统检测中存在的传感器体积较大、测量精度不高等问题,设计了一种基于光纤Bragg光栅(FBG)的一体式靶式流量传感器。在分析FBG及靶式流量传感原理的基础上,设计一种结构紧凑、便于密封和拆装的一体式靶片,将置于流体中迎流靶片所受的与流速成对应关系的冲击力转化成FBG波长的漂移,双FBG对称粘贴于悬臂梁上下表面的中轴线上,在提高传感灵敏度的同时,有效解决了温度与应变的交叉敏感问题。通过砝码干校实验测得传感器的灵敏度为3.55pm/g,其对应的流量灵敏度为0.076L/s。实验结果表明,双FBG中心波长的变化总量与加载在靶片上的质量有良好的线性关系,灵敏度是单个FBG灵敏度的2倍,且几乎不受环境温度的影响,稳定性、可靠性较好。
Aimed at the problems of larger volume and less accurate measurement of the traditional hydraulic system, an integrated target flow sensor based on fiber Bragg grating (FBG) was designed. Based on the analysis of FBG and the target flow sensing principle, a compact, easy-to-seal and disassembled one-piece target is designed and placed in the fluid Force into FBG wavelength drift, double FBG symmetrical paste on the cantilever beam on the upper and lower surface of the central axis, while improving the sensitivity of the sensor at the same time, effectively solve the temperature and strain cross-sensitive issues. The sensitivity of the sensor was 3.55pm / g and its corresponding flow sensitivity was 0.076L / s. The experimental results show that the total variation of the center wavelength of the double FBG has a good linear relationship with the mass loaded on the target, the sensitivity is twice that of a single FBG, and it is hardly influenced by the ambient temperature and has good stability and reliability .