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分析了基于衍射准直技术的f-θ透镜系统特性,进而提出一种大口径非球面轮廓测量方法。以二维相位板生成的衍射准直光束为测量基准光束,并以衍射光斑的暗线为位移基准,通过将超精密直线运动和超精密回转运动有机合成,实现了对大口径近平面非球面三维轮廓的回转扫描测量。研制出了实验样机,可测量的大口径非球面直径达500 mm,单点稳定性优于1μrad/200 s,与AK100Fizeau干涉仪的比对测量结果为PV值=0.1λ和RMS值=0.05λ,验证了本文提出的方案能够胜任大口径近平面非球面的三维轮廓检测,为将顺序扫描法拓展至大口径范围深度非球面轮廓测量提供了坚实的理论基础。
The characteristics of the f-θ lens system based on diffraction collimation technology are analyzed, and then a method for measuring large-diameter aspheric surface profile is proposed. By taking the diffraction-type collimated beam generated by the two-dimensional phase plate as the measurement reference beam and the dark line of the diffraction spot as the displacement reference, the ultra-precision linear motion and ultra-precise gyroscopic motion are synthesized, Contour rotation scanning measurement. Experimental prototypes were developed. The measurable large diameter aspherical surface has a diameter of 500 mm. The single point stability is better than 1 μrad / 200 s. The comparison with the AK100Fizeau interferometer shows PV = 0.1λ and RMS = 0.05λ , Which proves that the proposed scheme is capable of 3D contour detection of large-aperture near-plane aspheric surface. This provides a solid theoretical basis for extending the sequential scanning method to deep aspheric surface contouring with large aperture.