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采用自制实验装置,通过化学气相沉积钨过程中间断缠绕钨丝,得到钨丝-CVD钨复合材料。测试分析了材料的密度、成分及显微硬度;通过压溃试验计算出钨复合材料的压溃强度,通过拉伸试验和三点弯曲试验分别绘出拉伸和弯曲曲线。实验结果表明,化学反应温度控制在550℃,WF6和H2流量分别控制在2 g/min和1 L/min时,可得到没有孔洞的致密涂层。与相同工艺条件下不缠钨丝CVD钨样品相比,钨丝-CVD钨复合材料仍具有较高的纯度、致密度,显微硬度大致相同,而压溃强度、抗拉强度和抗弯强度大大提高。
A self-made experimental device was used to intermittently wind the tungsten wire through the chemical vapor deposition of tungsten to obtain a tungsten-CVD tungsten composite material. The density, composition and microhardness of the material were analyzed and tested. The crush strength of the tungsten composite was calculated by the crush test. The tensile and flexural curves were drawn by the tensile test and the three-point bending test respectively. The experimental results show that the dense coating without pores can be obtained when the chemical reaction temperature is controlled at 550 ℃ and the flow rates of WF6 and H2 are controlled at 2 g / min and 1 L / min, respectively. Compared with the tungsten-free CVD tungsten samples under the same process conditions, the tungsten-CVD tungsten composite still has higher purity, compactness and microhardness, while the crush strength, tensile strength and flexural strength Greatly improve.