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一、绪言光学干涉仪为精密测量动态范围较大的位移提供了一种有效方式,其最简单的结构是图1所示的迈克尔逊干涉仪。在工业测量中,大部份干涉仪使用氦氖激光器作为光源,并由许多分离的玻璃元件如反射镜、分光镜等组成。这些元件的加工必须十分精密,其成本也十分昂贵。目前已经研制出一种在硅片上集成光路的技术。利用该技术制成的干涉仪具有以下优点: ·硅片具有较大的面积((?)152.4mm),并具有很好的光学质量及适中的价格; ·集成光路可按机械加工平面技术制造,而且这种技术早已被半导体工业所采用;
I. INTRODUCTION Optical interferometers provide an effective way to accurately measure large displacements in the dynamic range. The simplest structure is the Michelson interferometer shown in Figure 1. In industrial measurement, most interferometers use a HeNe laser as a light source and consist of many separate glass elements such as mirrors, beamsplitters, and the like. The processing of these components must be very precise and cost prohibitive. At present, a technology of integrating the optical path on the silicon has been developed. Interferometers made with this technology have the following advantages: • Wafer has a large area (? 152.4mm), good optical quality and moderate price; • Integrated optical path can be made in Machining Plane Technology , And this kind of technology has already been adopted by the semi-conductive industry for a long time;