【摘 要】
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Cleaning of carbon-contaminated beamline optics was studied by RF plasma discharge process using O2/At.Carbon-coated samples were prepared,and through their cle
【机 构】
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Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201204, China
论文部分内容阅读
Cleaning of carbon-contaminated beamline optics was studied by RF plasma discharge process using O2/At.Carbon-coated samples were prepared,and through their cleaning processes key parameters were determined,such as the optimal RF output power,mixing rates of O2/Ar,and chamber vacuum.Considerations were made against possible adverse effects in cleaning the beamline optics,such as comparing the roughness of samples before and after cleaning,and possible detrimental kinetic effects on cable insulation.Under the cleaning parameters to clean the beamline optics,the thickness of removed carbon film and the change in beamline photon flux were analyzed.
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