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基于光学读出非制冷红外成像技术,本文作者提出并成功设计制作了无基底焦平面阵列结构(Focal Plane Array,FPA),不仅简化了制作工艺,而且大幅提升了成像性能。但由于其为单层膜结构,固有频率值低,可能会引起热机械振动噪声(NETDTM),导致噪声等效温度差(NETD)上升。为解决这一问题,本文提出两种改进的加强梁结构,借助有限元简化模型和激光位移传感器,通过数值模拟和实验验证,证实这两种结构可以大幅度提高FPA固有频率值(分别从74Hz提升至835Hz和404Hz),NETDTM降低约两个数量级,从而实现了对FPA的优化设计。
Based on optical readout uncooled infrared imaging technology, the author proposed and successfully designed a Focal Plane Array (FPA), which not only simplifies the fabrication process, but also greatly improves the imaging performance. However, due to its monolayer structure, the low natural frequency may cause NETDTM, leading to an increase in the noise equivalent temperature difference (NETD). In order to solve this problem, two improved beam structures are proposed in this paper. By means of finite element simplified model and laser displacement sensor, numerical simulation and experimental verification show that these two structures can significantly improve FPA natural frequency (from 74Hz Upgraded to 835Hz and 404Hz), NETDTM reduced by about two orders of magnitude, in order to achieve the optimal design of FPA.