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用MonteCarlo方法模拟了薄膜的二维生长 .引入Morse作用势描述粒子间的相互作用情况 ,研究了相互作用范围α对薄膜生长初期形貌的影响 .薄膜的生长经历了由临界核的形成、团的长大、形成迷津结构到连续成膜 4个阶段 .模拟结果表明 ,随着沉积粒子数的增加 ,成团粒子所占百分比下降 .这与实际情况相符 .
The Monte Carlo method was used to simulate the two-dimensional growth of the films. The Morse potential was used to describe the interaction between the particles and the influence of the interaction range α on the morphologies of the films was investigated. The formation of molybdenum structure to the continuous four-phase film formation.The simulation results show that with the increase of the number of deposition particles, the percentage of agglomerated particles decreased.This is consistent with the actual situation.