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对于“伺服电机+滚珠丝杠”驱动机构,摩擦、饱和和高频振动等非线性因素是实现大行程无超调高精度点位(PTP)控制的主要障碍.针对这种驱动系统,在根据刚体动力学计算得到的线性传递函数的基础上,设计了高增益PID闭环控制系统和输入滤波器来实现大行程的纳米定位.配置闭环控制系统的极点为负实轴上的多重极点,避免了摩擦力补偿和双模控制策略的使用.为了避免驱动器饱和所导致的闭环系统响应超调现象,基于数字低通滤波器设计了闭环输入信号.实验结果表明,该定位系统可以实现大行程无超调纳米精度点位控制,10 nm~100mm定位响应的稳态误差不超过±5 nm.
Non-linear factors such as friction, saturation and dithering are the main obstacles to achieve large-stroke, high-precision point-free (PTP) control for the “servo motor + ball screw drive mechanism.” For this drive system, Based on the linear transfer function calculated by rigid body dynamics, a high-gain PID closed-loop control system and an input filter are designed to achieve large-travel nanometer positioning.The poles of the closed-loop control system are configured as multiple poles on the negative real axis, Avoiding the use of friction compensation and dual-mode control strategy.In order to avoid the overshoot of the closed-loop system caused by the saturation of the driver, a closed-loop input signal is designed based on the digital low-pass filter.Experimental results show that the positioning system can achieve large stroke No overshoot Nano-precision point control, 10 nm ~ 100mm positioning response steady-state error does not exceed ± 5 nm.