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In this paper,we present an improved high-frequency equivalent circuit for SiGe heterojunction bipolar transistors (HBTs) with a CBE layout,where we consider the distributed effects along the base region.The actual device structure is divided into three parts:a link base region under a spacer oxide,an intrinsic transistor region under the emitter window,and an extrinsic base region.Each region is considered as a two-port network,and is composed of a distributed resistance and capacitance.We solve the admittance parameters by solving the transmission-line equation.Then,we obtain the smallsignal equivalent circuit depending on the reasonable approximations.Unlike previous compact models,in our proposed model,we introduce an additional inteal base node,and the intrinsic base resistance is shifted into this inteal base node,which can theoretically explain the anomalous change in the intrinsic bias-dependent collector resistance in the conventional compact model.